The Mitutoyo Laser Hologage is a high-end digital gaging system that employs diffracted laser beam interference to make highly accurate and repeatable measurements. It features ultra-fine diffraction gratings which are holographically recorded on the scale. The Laser Hologage is suitable for measuring ultra-high precision parts, especially those in semiconductor and related industries.
Highly accurate measurement due to an ultra-high resolution of 0.00001mm (0.01μm), which is close to the performance of laser interferometers.
- Excellent measuring stability — the design is also highly resistant to unfavorable environmental conditions such as air movement and atmospheric pressure changes.
- High-precision linear ball bearings are used in the guide for extremely smooth movement and exceptional durability.
- A display unit is provided.
Accuracy: Refer to the list of specifications.
Length standard: Laser-hologram measurement sensor
Max. Response speed: 250mm/s
Contact point: R5mm carbide
Bearing type: High precision linear ball bearing
Measuring force: Refer to the list of specifications
Output signal: 90º phase difference, two-phase sine wave
Signal pitch: 0.25μm
Cable Length: 80”/2m
971751: Stem fixture for fixing to top surface
971752: Stem fixture for fixing to bottom surface
971753: Spindle lifting cable
971750: Laser Hologage stand
*1: Indication accuracy applies when used with counters.