Laser Hologage LGH-High Resolution,High Accuracy Series 542

Series 542
Features
The Mitutoyo Laser Hologage is a high-end digital gaging system that employs diffracted laser beam interference to make highly accurate and repeatable measurements. It features ultra-fine diffraction gratings which are holographically recorded on the scale. The Laser Hologage is suitable for measuring ultra-high precision parts, especially those in semiconductor and related industries.
  • Highly accurate measurement due to an ultra-high resolution of 0.00001mm (0.01μm), which is close to the performance of laser interferometers.
    • Excellent measuring stability — the design is also highly resistant to unfavorable environmental conditions such as air movement and atmospheric pressure changes.
    • High-precision linear ball bearings are used in the guide for extremely smooth movement and exceptional durability.
    • A display unit is provided.
    Technical Data
    Accuracy: Refer to the list of specifications.
    Resolution: 0.01µm
    Length standard: Laser-hologram measurement sensor
    Max. Response speed: 250mm/s
    Contact point: R5mm carbide
    Stem: Ø15mm
    Bearing type: High precision linear ball bearing
    Measuring force: Refer to the list of specifications
    Output signal: 90º phase difference, two-phase sine wave
    Signal pitch: 0.25μm
    Cable Length: 80”/2m

    Optional Accessories
    971751: Stem fixture for fixing to top surface
    971752: Stem fixture for fixing to bottom surface
    971753: Spindle lifting cable
    971750: Laser Hologage stand

  • *1: Indication accuracy applies when used with counters.

    Specifications
    Order No542-925A542-926A
    ConfigurationSet of 1-axis gage head and display unitSet of 1-axis gage head and display unit
    Range4in 10mm4in 10mm
    Accuracy0.1µm0.1µm
    Force0.55N/0.45N/0.35N0.1N
    Stem Dia15mm15mm
    Remarks-Low measuring force
    Storage temperature (humidity) range–10 to 50°C (RH 30 to 70%, no condensation)
    The temperature and humidity range for
    storage after unpacking is the same as that for operation
    –10 to 50°C (RH 30 to 70%, no condensation)
    The temperature and humidity range for
    storage after unpacking is the same as that for operation
    Standard AccessoriesWrench for contact point: No.538610
    AC adapter: No.02ADN460
    AC cable (USA): No.02ZAA010*
    Wrench for contact point: No.538610
    AC adapter: No.02ADN460
    AC cable (USA): No.02ZAA010*
    Mass (Gage Head + Display Unit)1400g1400g
    Pages: 1