[*1]: Measuring range available when set to "No extra-fine wire measurement"or "Edge specification" in the basic setup mode.
[*2]: Environment for accuracy validation: 20ºC 1ºC temperature; 50% 10% humidity.
[*3]: The value of 2 o with a 2mm-diameter gage has been measured for two minutes with a measurement interval of
0.32 seconds, where is the standard deviation.
[*4]: The value of measurements in the center of the measurement region.
[*5]: Error due to the positional shift of the workpiece in the optical axis direction or scanning direction
[*6]: Averaging scans between 1 and 8 times can be made if "No extra-fine wire measurement" is specified in the basic setup mode.
The measuring range, however, is limited to 0.1mm to 2mm in this case