- Minimizes straightness errors through the use of a precision air-bearing linear guide system.
- Utilizes a 0.01µm resolution glass scale manufactured at an ultra-precision facility located eleven meters underground.
- Minimizes accuracy ﬂuctuation against thermal change through the use of virtually zero thermal expansion glass scales.
- Optimizes the mechanical structure of the main unit in Finite Element Method analysis.
- Stabilizes the geometrical accuracy (i.e. straightness of each axis and perpendicularity) to lessen thermal effects.
*1: Accuracy when measured at the center of the video screen
and in the middle of measuring stroke on a plane using the 5X objective and 1X tube lens
*2: Specified only for factory shipping inspection.
*3: Accuracy assurance environments in the case where no temperature compensation is performed.
Those in the case where temperature compensation is performed are as follows.
- Accuracy-assured temperature range: 20±2˚C
- Temperature variation: 0.5˚C/H
- Temperature gradient: 1˚C/m
*4: Thermal expansion coefficient: (0±0.02)X10-6/K
*5: Accuracy 1.3+3L/1000 for 20 ± 2°C, Accuracy 1.3+3.50L/1000 from 18 to 23°C
*6: An air source is required to maintain the original air pressure between 0.5 and 0.9MPa.
*7: Indicates the flow rate under normal conditions.
Tracking Auto Focus (TAF)
The TAF feature focuses continuously, adjusting to changes in the height of the object being measured. Automatic tracking of surface waves and warpage (in the Z axis height direction) improves measurement throughput. The feature also cuts out the hassle of focusing during manual measurement, reducing the work burden for measuring system operators.
Note: Continuous measurement of displacement is not performed.