MICSYS Series 549

Series 549
High-accuracy, Non-contact 2D Encoder
  • Simultaneous, non-contact measurement of X-Y position.
  • Nano-resolution measurement.
  • Suitable for applications such as stage position repeatability, strain measurement, deflection measurement, etc.
  • Applies the image correlation of a speckle pattern.
  • No scales needed—can detect on any optically rough surface.
  • Detector can be completely removed from surface and replaced to continue reading.
  • Drawings are available on request.

Order No.549-701A
Detection MethodLaser speckle image correlation
Repeatability (20Cº)5nm (s)
Accuracy (20Cº)+/-100nm; Linearity: 80nm
Effective Range± 100µm (2D)
Data Update Period20Hz
Laser Wavelength650nm (Visible) Class 2
Operating temperature and humidity rangeDetector: 15-25ºC, I/F unit: 0-40ºC, 20-80%RH (Non-condensing)
Storage temperature and humidity range-10-50ºC / ~85%RH (Non-condensing)
Power SupplyAC100-240V 45W 50/60Hz
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